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CVD Process Gases for Semiconductors

网上下注平台we have developed commercial tungsten hexafluoride which is used to mold metal wiring. we have also developed a commercial silicon gases for low-dielectric insulating layers that can accommodate the ongoing miniaturization and integration in semiconductors.

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WF6

these are semiconductor specialty gases used in the formation of contact plugs and silicide.

Purity 99.9995% or more
Packaging Cylinder (3.4L, 10L, 40L) Material: Stainless steel

Applications

  • CVD WSix, W Materials

SiH(CH3)3 (Trimethylsilane)

网上下注平台these are silicon gases for low dielectric constant interlayer insulating films that respond to advances in semiconductor device miniaturization and increasing integration.

Purity 99.9995% or more
Packaging Cylinder (10L, 47L) Material: Manganese steel

Applications

  • SiC, SiOC, SiO2, SiN membrane materials

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